4/10/2011	11:50:10 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
4/10/2011	11:50:10 AM	Recipe started at 11:50 AM
4/10/2011	11:50:10 AM	H2 valve closed
4/10/2011	11:50:10 AM	BCl3 valve closed
4/10/2011	11:50:10 AM	PH3 valve closed
4/10/2011	11:50:10 AM	SiCl4 pre valve closed
4/10/2011	11:50:10 AM	SiCl4 post valve closed
4/10/2011	11:50:10 AM	Main Vac valve closed
4/10/2011	11:50:10 AM	Bypass valve closed
4/10/2011	11:50:10 AM	Bubbler valve closed
4/10/2011	11:50:10 AM	Helium valve opened
4/10/2011	11:50:10 AM	Helium MFC set to  500.000000
4/10/2011	11:50:10 AM	H2 MFC set to  0.000000
4/10/2011	11:50:10 AM	BCl3 MFC set to  0.000000
4/10/2011	11:50:10 AM	PHl3 MFC set to  0.000000
4/10/2011	11:50:10 AM	SiCl4 MFC set to  0.000000
4/10/2011	11:50:10 AM	Bypass solenoid MFC set to  0.000000
4/10/2011	11:50:10 AM	Tube furnace set to 0
4/10/2011	11:51:31 AM	Helium valve closed
4/10/2011	11:51:31 AM	H2 valve closed
4/10/2011	11:51:31 AM	BCl3 valve closed
4/10/2011	11:51:31 AM	PH3 valve closed
4/10/2011	11:51:31 AM	SiCl4 pre valve closed
4/10/2011	11:51:31 AM	SiCl4 post valve closed
4/10/2011	11:51:31 AM	Main Vac valve closed
4/10/2011	11:51:31 AM	Bypass valve closed
4/10/2011	11:51:31 AM	Bubbler valve closed
4/10/2011	11:51:31 AM	Helium MFC set to  0.000000
4/10/2011	11:51:31 AM	H2 MFC set to  0.000000
4/10/2011	11:51:31 AM	BCl3 MFC set to  0.000000
4/10/2011	11:51:31 AM	PHl3 MFC set to  0.000000
4/10/2011	11:51:31 AM	SiCl4 MFC set to  0.000000
4/10/2011	11:51:31 AM	Bypass solenoid MFC set to  0.000000
4/10/2011	11:51:31 AM	Tube furnace set to 0
4/10/2011	11:51:31 AM	Run finished at 11:51 AM
4/10/2011	11:51:31 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
4/10/2011	12:04:49 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
4/10/2011	12:04:50 PM	Recipe started at 12:04 PM
4/10/2011	12:04:50 PM	Helium valve closed
4/10/2011	12:04:50 PM	H2 valve closed
4/10/2011	12:04:50 PM	BCl3 valve closed
4/10/2011	12:04:50 PM	PH3 valve closed
4/10/2011	12:04:50 PM	SiCl4 pre valve closed
4/10/2011	12:04:50 PM	SiCl4 post valve closed
4/10/2011	12:04:50 PM	Main Vac valve closed
4/10/2011	12:04:50 PM	Bubbler valve closed
4/10/2011	12:04:50 PM	Bypass valve opened
4/10/2011	12:04:50 PM	Helium MFC set to  0.000000
4/10/2011	12:04:50 PM	H2 MFC set to  0.000000
4/10/2011	12:04:50 PM	BCl3 MFC set to  0.000000
4/10/2011	12:04:50 PM	PHl3 MFC set to  0.000000
4/10/2011	12:04:50 PM	SiCl4 MFC set to  0.000000
4/10/2011	12:04:50 PM	Bypass solenoid MFC set to  0.000000
4/10/2011	12:04:50 PM	Tube furnace set to 0
4/10/2011	12:05:22 PM	Helium valve closed
4/10/2011	12:05:22 PM	H2 valve closed
4/10/2011	12:05:22 PM	BCl3 valve closed
4/10/2011	12:05:22 PM	PH3 valve closed
4/10/2011	12:05:22 PM	SiCl4 pre valve closed
4/10/2011	12:05:22 PM	SiCl4 post valve closed
4/10/2011	12:05:22 PM	Bubbler valve closed
4/10/2011	12:05:22 PM	Main Vac valve opened
4/10/2011	12:05:22 PM	Bypass valve opened
4/10/2011	12:05:22 PM	Helium MFC set to  0.000000
4/10/2011	12:05:22 PM	H2 MFC set to  0.000000
4/10/2011	12:05:22 PM	BCl3 MFC set to  0.000000
4/10/2011	12:05:22 PM	PHl3 MFC set to  0.000000
4/10/2011	12:05:22 PM	SiCl4 MFC set to  0.000000
4/10/2011	12:05:22 PM	Bypass solenoid MFC set to  0.000000
4/10/2011	12:05:22 PM	Tube furnace set to 0
4/10/2011	12:05:23 PM	Run finished at 12:05 PM
4/10/2011	12:05:23 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
4/10/2011	12:05:49 PM	Bypass valve closed
4/10/2011	12:05:50 PM	Main Vac valve closed
4/10/2011	12:05:55 PM	Main Vac valve opened
4/10/2011	12:05:56 PM	Bypass valve opened
4/10/2011	12:05:57 PM	Helium valve opened
4/10/2011	12:06:03 PM	Helium MFC set to  100.000000
4/10/2011	12:06:46 PM	Helium valve closed
4/10/2011	12:07:39 PM	Helium valve opened
4/10/2011	12:08:56 PM	Helium valve closed
4/10/2011	12:09:50 PM	Recipe started at 12:09 PM
4/10/2011	12:09:50 PM	BCl3 valve closed
4/10/2011	12:09:50 PM	PH3 valve closed
4/10/2011	12:09:50 PM	SiCl4 pre valve closed
4/10/2011	12:09:50 PM	SiCl4 post valve closed
4/10/2011	12:09:50 PM	Main Vac valve closed
4/10/2011	12:09:50 PM	Bypass valve closed
4/10/2011	12:09:50 PM	Bubbler valve closed
4/10/2011	12:09:50 PM	Helium valve opened
4/10/2011	12:09:50 PM	H2 valve opened
4/10/2011	12:09:50 PM	Helium MFC set to  47.500000
4/10/2011	12:09:50 PM	H2 MFC set to  2.500000
4/10/2011	12:09:50 PM	BCl3 MFC set to  0.000000
4/10/2011	12:09:50 PM	PHl3 MFC set to  0.000000
4/10/2011	12:09:50 PM	SiCl4 MFC set to  0.000000
4/10/2011	12:09:50 PM	Bypass solenoid MFC set to  0.000000
4/10/2011	12:09:50 PM	Tube furnace set to 0
4/10/2011	12:12:18 PM	Run aborted at 12:12 PM
4/10/2011	12:12:18 PM	Helium valve closed
4/10/2011	12:12:18 PM	H2 valve closed
4/10/2011	12:12:18 PM	BCl3 valve closed
4/10/2011	12:12:18 PM	PH3 valve closed
4/10/2011	12:12:18 PM	SiCl4 pre valve closed
4/10/2011	12:12:18 PM	SiCl4 post valve closed
4/10/2011	12:12:18 PM	Bypass valve closed
4/10/2011	12:12:18 PM	Main Vac valve closed
4/10/2011	12:12:18 PM	Bubbler valve closed
4/10/2011	12:12:18 PM	Helium MFC set to  0.000000
4/10/2011	12:12:18 PM	H2 MFC set to  0.000000
4/10/2011	12:12:18 PM	BCl3 MFC set to  0.000000
4/10/2011	12:12:18 PM	PHl3 MFC set to  0.000000
4/10/2011	12:12:18 PM	SiCl4 MFC set to  0.000000
4/10/2011	12:12:18 PM	Tube furnace set to 0
4/10/2011	12:13:45 PM	Recipe started at 12:13 PM
4/10/2011	12:13:45 PM	BCl3 valve closed
4/10/2011	12:13:45 PM	PH3 valve closed
4/10/2011	12:13:45 PM	SiCl4 pre valve closed
4/10/2011	12:13:45 PM	SiCl4 post valve closed
4/10/2011	12:13:45 PM	Main Vac valve closed
4/10/2011	12:13:45 PM	Bypass valve closed
4/10/2011	12:13:45 PM	Bubbler valve closed
4/10/2011	12:13:45 PM	Helium valve opened
4/10/2011	12:13:45 PM	H2 valve opened
4/10/2011	12:13:45 PM	Helium MFC set to  380.000000
4/10/2011	12:13:45 PM	H2 MFC set to  20.000000
4/10/2011	12:13:45 PM	BCl3 MFC set to  0.000000
4/10/2011	12:13:45 PM	PHl3 MFC set to  0.000000
4/10/2011	12:13:45 PM	SiCl4 MFC set to  0.000000
4/10/2011	12:13:45 PM	Bypass solenoid MFC set to  0.000000
4/10/2011	12:13:45 PM	Tube furnace set to 0
4/10/2011	12:15:11 PM	BCl3 valve closed
4/10/2011	12:15:11 PM	PH3 valve closed
4/10/2011	12:15:11 PM	SiCl4 pre valve closed
4/10/2011	12:15:11 PM	SiCl4 post valve closed
4/10/2011	12:15:11 PM	Main Vac valve closed
4/10/2011	12:15:11 PM	Bypass valve closed
4/10/2011	12:15:11 PM	Helium valve opened
4/10/2011	12:15:11 PM	H2 valve opened
4/10/2011	12:15:11 PM	Bubbler valve opened
4/10/2011	12:15:11 PM	Helium MFC set to  47.500000
4/10/2011	12:15:11 PM	H2 MFC set to  2.500000
4/10/2011	12:15:11 PM	BCl3 MFC set to  0.000000
4/10/2011	12:15:11 PM	PHl3 MFC set to  0.000000
4/10/2011	12:15:11 PM	SiCl4 MFC set to  0.000000
4/10/2011	12:15:11 PM	Bypass solenoid MFC set to  0.000000
4/10/2011	12:15:12 PM	Tube furnace set to 350
4/10/2011	8:15:12 PM	Helium valve closed
4/10/2011	8:15:12 PM	H2 valve closed
4/10/2011	8:15:12 PM	BCl3 valve closed
4/10/2011	8:15:12 PM	PH3 valve closed
4/10/2011	8:15:12 PM	SiCl4 pre valve closed
4/10/2011	8:15:12 PM	SiCl4 post valve closed
4/10/2011	8:15:12 PM	Main Vac valve closed
4/10/2011	8:15:12 PM	Bypass valve closed
4/10/2011	8:15:12 PM	Bubbler valve closed
4/10/2011	8:15:12 PM	Helium MFC set to  0.000000
4/10/2011	8:15:12 PM	H2 MFC set to  0.000000
4/10/2011	8:15:12 PM	BCl3 MFC set to  0.000000
4/10/2011	8:15:12 PM	PHl3 MFC set to  0.000000
4/10/2011	8:15:12 PM	SiCl4 MFC set to  0.000000
4/10/2011	8:15:12 PM	Bypass solenoid MFC set to  0.000000
4/10/2011	8:15:12 PM	Tube furnace set to 0
4/10/2011	8:15:12 PM	Run finished at 8:15 PM
4/10/2011	9:44:23 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
4/10/2011	9:44:23 PM	Recipe started at 9:44 PM
4/10/2011	9:44:23 PM	Helium valve closed
4/10/2011	9:44:23 PM	H2 valve closed
4/10/2011	9:44:23 PM	BCl3 valve closed
4/10/2011	9:44:23 PM	PH3 valve closed
4/10/2011	9:44:23 PM	SiCl4 pre valve closed
4/10/2011	9:44:23 PM	SiCl4 post valve closed
4/10/2011	9:44:23 PM	Main Vac valve closed
4/10/2011	9:44:23 PM	Bubbler valve closed
4/10/2011	9:44:23 PM	Bypass valve opened
4/10/2011	9:44:23 PM	Helium MFC set to  0.000000
4/10/2011	9:44:23 PM	H2 MFC set to  0.000000
4/10/2011	9:44:23 PM	BCl3 MFC set to  0.000000
4/10/2011	9:44:23 PM	PHl3 MFC set to  0.000000
4/10/2011	9:44:23 PM	SiCl4 MFC set to  0.000000
4/10/2011	9:44:23 PM	Bypass solenoid MFC set to  0.000000
4/10/2011	9:44:24 PM	Tube furnace set to 0
4/10/2011	9:44:54 PM	Helium valve closed
4/10/2011	9:44:54 PM	H2 valve closed
4/10/2011	9:44:54 PM	BCl3 valve closed
4/10/2011	9:44:54 PM	PH3 valve closed
4/10/2011	9:44:54 PM	SiCl4 pre valve closed
4/10/2011	9:44:54 PM	SiCl4 post valve closed
4/10/2011	9:44:54 PM	Bubbler valve closed
4/10/2011	9:44:54 PM	Main Vac valve opened
4/10/2011	9:44:54 PM	Bypass valve opened
4/10/2011	9:44:54 PM	Helium MFC set to  0.000000
4/10/2011	9:44:54 PM	H2 MFC set to  0.000000
4/10/2011	9:44:54 PM	BCl3 MFC set to  0.000000
4/10/2011	9:44:54 PM	PHl3 MFC set to  0.000000
4/10/2011	9:44:54 PM	SiCl4 MFC set to  0.000000
4/10/2011	9:44:54 PM	Bypass solenoid MFC set to  0.000000
4/10/2011	9:44:55 PM	Tube furnace set to 0
4/10/2011	9:44:55 PM	Run finished at 9:44 PM
4/10/2011	9:44:55 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
